Bipolar applied field experiments to characterize dielectric relaxation and describe charge transport in low-k materials

Juan Borja, Joel L. Plawsky, T. M. Lu, William N. Gill

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

TDDB model • Depict interaction between electron, intrinsic defects and ionic species • Provide physical description of failure mechanisms • Adequate prediction for dielectric breakdown.

Original languageEnglish
Title of host publicationAdvanced Metallization Conference 2012
Pages196-203
Number of pages8
StatePublished - 2012
Externally publishedYes
EventAdvanced Metallization Conference 2012 - Albany, NY, United States
Duration: 9 Oct 201211 Oct 2012

Publication series

NameAdvanced Metallization Conference (AMC)
ISSN (Print)1540-1766

Conference

ConferenceAdvanced Metallization Conference 2012
Country/TerritoryUnited States
CityAlbany, NY
Period9/10/1211/10/12

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