Carbon doping of cubic GaN under gallium-rich growth conditions

D. J. As, D. G. Pacheco-Salazar, S. Potthast, K. Lischka

Research output: Contribution to journalConference articlepeer-review

2 Scopus citations


Successful p-type doping of cubic GaN by carbon grown under Ga-rich conditions is reported with maximum hole concentration of 6 × 10 18 cm-3 and hole mobility of 19 cm2/Vs at room temperature, respectively. Cubic GaN:C was grown by rf-plasma assisted molecular beam epitaxy (MBE) on a semiinsulating GaAs (001) substrate (3 inches wafer). C-doping of the c-GaN was achieved by e-beam evaporation of a graphite rode with an C-flux of 1 × 1012 cm-2 s-1. Optical microscopy, Hall-effect measurements and room temperature photoluminescence were used for the investigation of the morphological, electrical and optical properties of cubic GaN:C. Under Ga-rich growth conditions most part of the carbon atoms were incorporated substitutially on N-site giving p-type conductivity. Our results verify that effective p-type doping of c-GaN can be achieved under Ga-rich growth conditions.

Original languageEnglish
Pages (from-to)2537-2540
Number of pages4
JournalPhysica Status Solidi C: Conferences
Issue number7
StatePublished - 2003
Externally publishedYes
Event5th International Conference on Nitride Semiconductors, ICNS 2003 - Nara, Japan
Duration: 25 May 200330 May 2003


Dive into the research topics of 'Carbon doping of cubic GaN under gallium-rich growth conditions'. Together they form a unique fingerprint.

Cite this