Electrical and optical properties of carbon doped cubic GaN epilayers grown under extreme Ga excess

P-type doping of cubic GaN by carbon is reported with maximum hole concentration of 6.1×10¹⁸cm^-3 and hole mobility of 23.5 cm²/Vs at room temperature, respectively. The cubic GaN:C was grown by rf-plasma assisted molecular beam epitaxy (MBE) under Ga-rich growth conditions on a semiinsulating GaAs (001) substrate (3 inches wafer). E-beam evaporation of a graphite rode with an C-flux of I×10¹²cm ^-2s^-1 was used for C-doping of the c-GaN. Optical microscopy, Hall-effect measurements and photoluminescence were performed to investigate the morphological, electrical and optical properties of cubic GaN:C. Under Ga-rich growth conditions most part of the carbon atoms were incorporated substitutially on N-site giving p-type conductivity. Our results verify that effective p-type doping of c-GaN can be achieved under extrem Ga excess.