Experimental Techniques

Juan Pablo Borja; Toh Ming Lu; Joel Plawsky

doi:10.1007/978-3-319-43220-5_4

Experimental Techniques

Juan Pablo Borja, Toh Ming Lu, Joel Plawsky

Research output: Chapter in Book/Report/Conference proceeding › Chapter › peer-review

Abstract

Various tests to characterize dielectric properties and breakdown will be presented in this section. The fundamental concepts behind each test are explained along with potential limitations. The chapter is divided into three parts: breakdown assessment, material characterization, and interfacial/bulk composition analysis. Tests presented in this section for breakdown will include constant bias, constant current, ramped voltage, ramped current, and bipolar field. These tests provide insight into dielectric reliability and failure mode. Material and device characterization tests covered here will include capacitance–voltage spectroscopy and triangular voltage spectroscopy. These tests can help to identify important charged species inside the dielectric and their impact on failure mechanisms. Secondary ion mass spectrometry and its application to resolving interfacial/bulk dielectric properties will also be explained.

Original language	English
Title of host publication	SpringerBriefs in Materials
Publisher	Springer
Pages	27-36
Number of pages	10
DOIs	https://doi.org/10.1007/978-3-319-43220-5_4
State	Published - 2016
Externally published	Yes

Publication series

Name	SpringerBriefs in Materials
ISSN (Print)	2192-1091
ISSN (Electronic)	2192-1105

Bibliographical note

Publisher Copyright:
© 2016, The Author(s).

Keywords

Bipolar field
Breakdown
Capacitance
Constant field
Current
Dielectric characterization
Ramped field
SIMS
Spectroscopy
Tests

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10.1007/978-3-319-43220-5_4

Cite this

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AU - Lu, Toh Ming

AU - Plawsky, Joel

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AB - Various tests to characterize dielectric properties and breakdown will be presented in this section. The fundamental concepts behind each test are explained along with potential limitations. The chapter is divided into three parts: breakdown assessment, material characterization, and interfacial/bulk composition analysis. Tests presented in this section for breakdown will include constant bias, constant current, ramped voltage, ramped current, and bipolar field. These tests provide insight into dielectric reliability and failure mode. Material and device characterization tests covered here will include capacitance–voltage spectroscopy and triangular voltage spectroscopy. These tests can help to identify important charged species inside the dielectric and their impact on failure mechanisms. Secondary ion mass spectrometry and its application to resolving interfacial/bulk dielectric properties will also be explained.

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KW - Breakdown

KW - Capacitance

KW - Constant field

KW - Current

KW - Dielectric characterization

KW - Ramped field

KW - SIMS

KW - Spectroscopy

KW - Tests

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Experimental Techniques

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