Experimental Techniques

Juan Pablo Borja, Toh Ming Lu, Joel Plawsky

Research output: Chapter in Book/Report/Conference proceedingChapterpeer-review


Various tests to characterize dielectric properties and breakdown will be presented in this section. The fundamental concepts behind each test are explained along with potential limitations. The chapter is divided into three parts: breakdown assessment, material characterization, and interfacial/bulk composition analysis. Tests presented in this section for breakdown will include constant bias, constant current, ramped voltage, ramped current, and bipolar field. These tests provide insight into dielectric reliability and failure mode. Material and device characterization tests covered here will include capacitance–voltage spectroscopy and triangular voltage spectroscopy. These tests can help to identify important charged species inside the dielectric and their impact on failure mechanisms. Secondary ion mass spectrometry and its application to resolving interfacial/bulk dielectric properties will also be explained.

Original languageEnglish
Title of host publicationSpringerBriefs in Materials
Number of pages10
StatePublished - 2016
Externally publishedYes

Publication series

NameSpringerBriefs in Materials
ISSN (Print)2192-1091
ISSN (Electronic)2192-1105

Bibliographical note

Publisher Copyright:
© 2016, The Author(s).


  • Bipolar field
  • Breakdown
  • Capacitance
  • Constant field
  • Current
  • Dielectric characterization
  • Ramped field
  • SIMS
  • Spectroscopy
  • Tests


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