Electrical and optical properties of carbon doped cubic GaN epilayers grown under extreme Ga excess

D. J. As, David Gregorio Pacheco Salazar, S. Potthast, K. Lischka

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Resumen

P-type doping of cubic GaN by carbon is reported with maximum hole concentration of 6.1×1018cm-3 and hole mobility of 23.5 cm2/Vs at room temperature, respectively. The cubic GaN:C was grown by rf-plasma assisted molecular beam epitaxy (MBE) under Ga-rich growth conditions on a semiinsulating GaAs (001) substrate (3 inches wafer). E-beam evaporation of a graphite rode with an C-flux of I×1012cm -2s-1 was used for C-doping of the c-GaN. Optical microscopy, Hall-effect measurements and photoluminescence were performed to investigate the morphological, electrical and optical properties of cubic GaN:C. Under Ga-rich growth conditions most part of the carbon atoms were incorporated substitutially on N-site giving p-type conductivity. Our results verify that effective p-type doping of c-GaN can be achieved under extrem Ga excess.

Idioma originalInglés
Páginas (desde-hasta)515-520
Número de páginas6
PublicaciónMaterials Research Society Symposium - Proceedings
Volumen798
DOI
EstadoPublicada - 2003
Publicado de forma externa
EventoGaN and Related Alloys - 2003 - Boston, MA, Estados Unidos
Duración: 1 dic. 20035 dic. 2003

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