P-type doping of cubic GaN by carbon is reported with maximum hole concentration of 6.1×1018cm-3 and hole mobility of 23.5 cm2/Vs at room temperature, respectively. The cubic GaN:C was grown by rf-plasma assisted molecular beam epitaxy (MBE) under Ga-rich growth conditions on a semiinsulating GaAs (001) substrate (3 inches wafer). E-beam evaporation of a graphite rode with an C-flux of I×1012cm -2s-1 was used for C-doping of the c-GaN. Optical microscopy, Hall-effect measurements and photoluminescence were performed to investigate the morphological, electrical and optical properties of cubic GaN:C. Under Ga-rich growth conditions most part of the carbon atoms were incorporated substitutially on N-site giving p-type conductivity. Our results verify that effective p-type doping of c-GaN can be achieved under extrem Ga excess.
|Número de páginas||6|
|Publicación||Materials Research Society Symposium - Proceedings|
|Estado||Publicada - 2003|
|Publicado de forma externa||Sí|
|Evento||GaN and Related Alloys - 2003 - Boston, MA, Estados Unidos|
Duración: 1 dic. 2003 → 5 dic. 2003